IMAGING LATCH-UP SITES IN CMOS INTEGRATED CIRCUITS USING LASER SCANNING.
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abstract
A novel approach to using laser scanning to analyze latch-up sites in CMOS integrated circuits has been developed. The technique uses a CW laser beam scanned across a CMOS IC as the power to the IC is modulated. Signals corresponding to latch-up currents are detected with a lock-in amplifier and are used to produce a two-dimensional image of latch up-sites on a high-resolution monitor.