ULTRA-LOW POWER SELF-COMPUTING BINARY OUTPUT DIGITAL MEMS ACCELEROMETER Conference Paper

abstract

• 2016 IEEE. This work presents the concept and preliminary results for electromechanical self-computing binary output digital accelerometers. Such devices require only bias voltages and no readout or control electronics for operation (zero static power for operation). The device comprises of a number of acceleration switches (equal to the number of the bits of resolution) which are coupled to each other via electrostatic actuators. As a result of an applied acceleration and interactions of switches and actuators with each other, a digitized binary acceleration output is generated. In this work, a 2-bit accelerometer operating in the 0-1g range is successfully demonstrated.

name of conference

• 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

authors

• Jafari, Roozbeh

published proceedings

• 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

altmetric score

• 6

author list (cited authors)

• Kumar, V., Guo, X., Jafari, R., & Pourkamali, S.

citation count

• 3

complete list of authors

• Kumar, Varun||Guo, Xiaobo||Jafari, Roozbeh||Pourkamali, Siavash

publication date

• January 2016

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  Journal

Digital Object Identifier (DOI)

• 10.1109/memsys.2016.7421607

International Standard Book Number (ISBN) 13

• 9781509019731

start page

• 251

end page

• 254

volume

• 2016-February

URL

• http://dx.doi.org/10.1109/memsys.2016.7421607