ULTRA-LOW POWER SELF-COMPUTING BINARY OUTPUT DIGITAL MEMS ACCELEROMETER
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2016 IEEE. This work presents the concept and preliminary results for electromechanical self-computing binary output digital accelerometers. Such devices require only bias voltages and no readout or control electronics for operation (zero static power for operation). The device comprises of a number of acceleration switches (equal to the number of the bits of resolution) which are coupled to each other via electrostatic actuators. As a result of an applied acceleration and interactions of switches and actuators with each other, a digitized binary acceleration output is generated. In this work, a 2-bit accelerometer operating in the 0-1g range is successfully demonstrated.
name of conference
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
author list (cited authors)
Kumar, V., Guo, X., Jafari, R., & Pourkamali, S.
complete list of authors
Kumar, Varun||Guo, Xiaobo||Jafari, Roozbeh||Pourkamali, Siavash