ULTRA-LOW POWER SELF-COMPUTING BINARY OUTPUT DIGITAL MEMS ACCELEROMETER Conference Paper uri icon

abstract

  • 2016 IEEE. This work presents the concept and preliminary results for electromechanical self-computing binary output digital accelerometers. Such devices require only bias voltages and no readout or control electronics for operation (zero static power for operation). The device comprises of a number of acceleration switches (equal to the number of the bits of resolution) which are coupled to each other via electrostatic actuators. As a result of an applied acceleration and interactions of switches and actuators with each other, a digitized binary acceleration output is generated. In this work, a 2-bit accelerometer operating in the 0-1g range is successfully demonstrated.

name of conference

  • 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

published proceedings

  • 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

altmetric score

  • 6

author list (cited authors)

  • Kumar, V., Guo, X., Jafari, R., & Pourkamali, S.

citation count

  • 3

complete list of authors

  • Kumar, Varun||Guo, Xiaobo||Jafari, Roozbeh||Pourkamali, Siavash

publication date

  • January 2016