Imaging Latch-up Sites in CMOS Integrated Circuits Using Laser Scanning Academic Article uri icon


  • A novel approach to using laser scanning to analyze latch-up sites in complementary metal-oxide semiconductor (CMOS) integrated circuits (IC's) has been developed. The technique employs a continuous wave (CW) laser beam scanned across a CMOS IC as the power to the IC is modulated. Signals corresponding to latch-up currents are detected with a lock-in amplifier and are used to produce a two-dimensional image of latch-up sites on a high resolution monitor. 1986 IEEE

published proceedings

  • IEEE Transactions on Components, Hybrids, and Manufacturing Technology

author list (cited authors)

  • Weichold, M., Parker, D., & Fenech, J.

citation count

  • 2

complete list of authors

  • Weichold, M||Parker, D||Fenech, J-F

publication date

  • December 1985