Stress-induced nanostructures through laser-assisted scanning probe nanolithography. Academic Article uri icon

abstract

  • We demonstrate a methodology using a laser-assisted scanning probe nanolithography (LASPN) technique to generate organized nanostructures. Experimental approach combined with finite element analysis was utilized to study the interfacial interactions between a gold-coated probe of an atomic force microscope and a single crystal silicon substrate. Research results proved that the tip temperature had been raised via LASPN to 900 K at a laser power of 12 mW. Nanolines were formed during sliding while the silicon substrate was heated at a laser power of 5 mW. We propose an energy model to explain the phenomenon.

published proceedings

  • Scanning

author list (cited authors)

  • Peng, L., Zhang, H., Yang, B., Tang, L., Hemmer, P., & Liang, H.

citation count

  • 1

complete list of authors

  • Peng, Luohan||Zhang, Huiliang||Yang, Bao||Tang, Liqun||Hemmer, Philip||Liang, Hong

publication date

  • September 2010

publisher