A Novel Scanning Probe Array with Multiple Tip Sharpness for Variable-Resolution Scanning Probe Lithography Applications Conference Paper

abstract

• We report the development and application of a novel scanning probe array that consists of "blunt" and "sharp" tips with precisely defined contact areas. A new micromachining process based on SOI (silicon-on-insulator) substrates has been successfully developed to enable the fabrication of the scanning probe array. To demonstrate its capability for variable-resolution scanning probe lithography, the scanning probe array has been used to simultaneously generate fluorescent patterns with different linewidths in a parallel mode. 2008 IEEE.

name of conference

• 2008 8th IEEE Conference on Nanotechnology

authors

• Zou, Jun

published proceedings

• 2008 8th IEEE Conference on Nanotechnology

author list (cited authors)

• Yapici, M. K., & Zou, J.

citation count

• 1

complete list of authors

• Yapici, Murat Kaya||Zou, Jun

publication date

• August 2008

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

Digital Object Identifier (DOI)

• 10.1109/nano.2008.50

International Standard Book Number (ISBN) 13

• 9781424421046

start page

• 147

end page

• 150

URL

• http://dx.doi.org/10.1109/nano.2008.50