A Novel Scanning Probe Array with Multiple Tip Sharpness for Variable-Resolution Scanning Probe Lithography Applications Conference Paper uri icon


  • We report the development and application of a novel scanning probe array that consists of "blunt" and "sharp" tips with precisely defined contact areas. A new micromachining process based on SOI (silicon-on-insulator) substrates has been successfully developed to enable the fabrication of the scanning probe array. To demonstrate its capability for variable-resolution scanning probe lithography, the scanning probe array has been used to simultaneously generate fluorescent patterns with different linewidths in a parallel mode. © 2008 IEEE.

author list (cited authors)

  • Yapici, M. K., & Zou, J.

citation count

  • 2

publication date

  • August 2008