A novel micromachining technique for the batch fabrication of scanning probe arrays with precisely defined tip contact areas uri icon

abstract

  • This paper reports a novel micromachining technique for the batch fabrication of scanning probe arrays with different tip contact areas. Based on the bulk micromachining of silicon-on-insulator substrates, it eliminates the need for time-dependent etching processes and thus is capable of simultaneously fabricating both 'sharp' and 'blunt' scanning probes with precisely defined tip contact areas in a controllable and repeatable manner. As an example of the application of this probe fabrication technique, prototype scanning probe arrays have been successfully fabricated and used to demonstrate variable-resolution scanning probe lithography of fluorescent dyes in a parallel mode. 2008 IOP Publishing Ltd.

published proceedings

  • JOURNAL OF MICROMECHANICS AND MICROENGINEERING

author list (cited authors)

  • Yapici, M. K., & Zou, J.

citation count

  • 6

complete list of authors

  • Yapici, Murat Kaya||Zou, Jun

publication date

  • August 2008