A new water-immersible two-axis MEMS scanning mirror for photoacoustic microscopy Conference Paper uri icon

abstract

  • OSA 2016. A new water-immersible two-axis MEMS scanning mirror has been designed, fabricated, and tested for both laser and ultrasound beam steering. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.

published proceedings

  • Optics InfoBase Conference Papers

author list (cited authors)

  • Xu, S., Huang, C. H., & Zou, J.

complete list of authors

  • Xu, S||Huang, CH||Zou, J

publication date

  • April 2016