A new water-immersible two-axis MEMS scanning mirror for photoacoustic microscopy
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OSA 2016. A new water-immersible two-axis MEMS scanning mirror has been designed, fabricated, and tested for both laser and ultrasound beam steering. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.
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author list (cited authors)
Xu, S., Huang, C. H., & Zou, J.
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