I-DDQ data analysis using neighbor current ratios
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abstract
IDDQ test loses its effectiveness for deep sub-micron chips since it cannot distinguish between faulty and fault-free currents. The concept of current ratios, in which the ratio of maximum to minimum IDDQ is used to screen faulty chips, has been previously proposed. However, it is incapable of screening some defects. The neighboring chips on a wafer have similar fault-free properties and are correlated. In this paper, the use of spatial correlation in combination with current ratios is investigated. By differentiating chips based on their non-conformance to local IDDQ variation, outliers are identified. The analysis of SEMATECH test data is presented. 2003 Elsevier B.V. All rights reserved.