RIGOROUS ANALYSIS OF LIGHT SCATTERING FROM MULTILAYERED GRATINGS WITH BIAXIAL ANISOTROPY Conference Paper uri icon

abstract

  • The rigorous coupled-wave approach (RCWA) is applied to analyze light scattering from one-dimensional lamellar multilayered gratings with biaxial anisotropy. Numerical results are presented for photoresist traces on a silicon substrate, showing the effect of anisotropy on the Stokes parameters.

published proceedings

  • 2008 MIKON CONFERENCE PROCEEDINGS, VOLS 1 AND 2

author list (cited authors)

  • Michalski, K. A.

publication date

  • January 1, 2008 11:11 AM