RIGOROUS ANALYSIS OF LIGHT SCATTERING FROM MULTILAYERED GRATINGS WITH BIAXIAL ANISOTROPY
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The rigorous coupled-wave approach (RCWA) is applied to analyze light scattering from one-dimensional lamellar multilayered gratings with biaxial anisotropy. Numerical results are presented for photoresist traces on a silicon substrate, showing the effect of anisotropy on the Stokes parameters.
2008 MIKON CONFERENCE PROCEEDINGS, VOLS 1 AND 2
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