A Lossless Circuit Layout Image Compression Algorithm for Electron Beam Direct Write Lithography Systems Conference Paper uri icon


  • The recent algorithm Corner is a transform-based technique to represent a circuit layout image for electron beam direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1) it requires fewer symbols during the corner transform, 2) it has a simpler and faster decoding process, and 3) it requires a similar amount of memory for the decoding process. 2011 SPIE.

name of conference

  • Alternative Lithographic Technologies III

published proceedings


author list (cited authors)

  • Yang, J., & Savari, S. A.

citation count

  • 4

complete list of authors

  • Yang, Jeehong||Savari, Serap A

editor list (cited editors)

  • Herr, D.

publication date

  • January 2011