Lossless circuit layout image compression algorithm for maskless direct write lithography systems Academic Article uri icon


  • The recent algorithm Corner is a transform-based technique to represent a circuit layout image for maskless direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1. it requires fewer symbols during the corner transform, 2. it has a simpler and faster decoding process, while 3. it requires a similar amount of memory for the decoding process. 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).

published proceedings

  • Journal of Micro/Nanolithography, MEMS, and MOEMS

author list (cited authors)

  • Savari, S. A.

citation count

  • 10

complete list of authors

  • Savari, Serap A

publication date

  • October 2011