Lossless circuit layout image compression algorithm for maskless direct write lithography systems Academic Article

abstract

• The recent algorithm Corner is a transform-based technique to represent a circuit layout image for maskless direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1. it requires fewer symbols during the corner transform, 2. it has a simpler and faster decoding process, while 3. it requires a similar amount of memory for the decoding process. 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).

authors

• Savari, Serap

published proceedings

• JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS

author list (cited authors)

• Yang, J., & Savari, S. A.

citation count

• 9

complete list of authors

• Yang, Jeehong||Savari, Serap A

publication date

• January 2011

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Journal of Micro/Nanolithography, MEMS, and MOEMS  Journal

keywords

• Data Compression
• Information Theory
• Integrated Circuit Fabrication
• Maskless Direct Write Lithography

Digital Object Identifier (DOI)

• 10.1117/1.3644620

start page

• 043007-043007-13

end page

• 043007

volume

• 10

issue

• 4