Lossless circuit layout image compression algorithm for maskless direct write lithography systems
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The recent algorithm Corner is a transform-based technique to represent a circuit layout image for maskless direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1. it requires fewer symbols during the corner transform, 2. it has a simpler and faster decoding process, while 3. it requires a similar amount of memory for the decoding process. 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).
Journal of Micro/Nanolithography, MEMS, and MOEMS
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