Data Delivery System for MAPPER using Image Compression Conference Paper

abstract

• The data delivery throughput of electron beam lithography systems can be improved by applying lossless image compression to the layout image and using an electron beam writer that can decode the compressed image on-the-fly. In earlier research we introduced the lossless layout image compression algorithm Corner2, which assumes a somewhat idealized writing strategy, namely row-by-row with a raster order. The MAPPER system has electron beam writers positioned in a lattice formation and each electron beam writer writes a designated block in a zig-zag order. We introduce Corner2-MEB, which redesigns Corner2 for MAPPER systems. 2013 SPIE.

name of conference

• Alternative Lithographic Technologies V

authors

• Savari, Serap

published proceedings

• ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES V

author list (cited authors)

• Yang, J., & Savari, S. A.

citation count

• 4

complete list of authors

• Yang, Jeehong||Savari, Serap A

editor list (cited editors)

• Tong, W. M., & Resnick, D. J.

publication date

• January 2013

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• Data Compression
• Data Delivery
• Image Compression
• Maskless Direct Write Lithography
• Multiple Electron Beam Lithography

Digital Object Identifier (DOI)

• 10.1117/12.2011298

International Standard Book Number (ISBN) 13

• 9780819494627

start page

• 86800q-86800q-15

volume

• 8680

URL

• http%3A%2F%2Fdx.doi.org%2F10.1117%2F12.2011298