Hardware Implementation of Corner2 Lossless Compression Algorithm for Maskless Lithography Systems Conference Paper

abstract

• The data delivery throughput of maskless lithography systems can be improved by applying a lossless image compression algorithm to the layout images and using a lithography writer that contains a decoding circuit packed in single silicon to decode the compressed image on-the-fly. In our past research we have introduced Corner2, a layout image compression algorithm which achieved significantly better performance in all aspects (compression ratio, encoding/decoding speed, decoder memory requirement) than Block C4. In this paper, we present the synthesis results of the Corner2 decoder for FPGA implementation. 2012 Copyright SPIE.

name of conference

• Alternative Lithographic Technologies IV

authors

• Savari, Serap

published proceedings

• ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES IV

author list (cited authors)

• Yang, J., Li, X., & Savari, S. A.

citation count

• 3

complete list of authors

• Yang, Jeehong||Li, Xiaohui||Savari, Serap A

editor list (cited editors)

• Tong, W. M.

publication date

• March 2012

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• Corner2
• Data Compression
• Data Delivery System For Maskless Lithography

Digital Object Identifier (DOI)

• 10.1117/12.917581

International Standard Book Number (ISBN) 13

• 9780819489791

start page

• 83232o-83232o-6

volume

• 8323

URL

• http://dx.doi.org/10.1117/12.917581