Formation of 1-D Nanostructures Using Atomic Force Microscope

abstract

• In this paper, we develop a new process using an atomic force microscope (AFM) to fabricate micro- and nanostructures. An AFM probe was coated with gold, and then, slid on a silicon substrate in ambient environment. Repetitive sliding of the probe generated a nanostructure on the substrate instead of plowing. The Au material was found to transfer from the probe onto the Si substrate. Morphological, electrical, and chemical properties were characterized using high-resolution techniques. It was found that the nanostructure was composed of an AuSi alloy, which behaved like a conductor. The mechanisms of the process and effects of electrical potential are discussed in this paper. 2006 IEEE.

authors

• Zou, Jun

published proceedings

• IEEE TRANSACTIONS ON NANOTECHNOLOGY

author list (cited authors)

• Lee, H., Cooper, R., Yapici, M. K., Zou, J., & Liang, H.

citation count

• 0

complete list of authors

• Lee, Hyungoo||Cooper, Rodrigo||Yapici, Murat Kaya||Zou, Jun||Liang, Hong

publication date

• January 2011

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Transactions On Nanotechnology  Journal

keywords

• Atomic Force Microscope (afm)
• Nanolithography
• Nanostructure

Digital Object Identifier (DOI)

• 10.1109/TNANO.2010.2040190

start page

• 310

end page

• 318

volume

• 10

issue

• 2

URL

• http%3A%2F%2Fdx.doi.org%2F10.1109%2Ftnano.2010.2040190