Effects of ion implantation on the surface mechanical properties of sol-gel derived TEOS/MTES thin films Academic Article uri icon

abstract

  • A study of the effects of ion implantation of hybrid organic/inorganic modified silicate thin films on their surface mechanical properties is presented. The thin films were synthesized by sol-gel processing from tetraethylorthosilicate (TEOS) and methyltriethoxysilane (MTES) precursors and spin-coated onto Si substrates. After heat treatment at 300 C for 10 min, the films were implanted with 100 keV Si+, O+ and N+ with fluences ranging from 1 1014 to 3 1016 ions/cm2. Both hardness and reduced elastic modulus were seen to exhibit a monotonic increase with fluence for 100 keV Si+ implanted films. When implanted with different ions having the same fluence and similar electronic stopping, no observable differences in the hardness and reduced elastic modulus depth profiles could be seen. 2007 Elsevier B.V. All rights reserved.

published proceedings

  • NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

author list (cited authors)

  • Lucca, D. A., Ghisleni, R., Nastasi, M., Shao, L., Wang, Y. Q., Dong, J., & Mehner, A.

citation count

  • 8

complete list of authors

  • Lucca, DA||Ghisleni, R||Nastasi, M||Shao, L||Wang, YQ||Dong, J||Mehner, A

publication date

  • April 2007