Effects of heat treatment and ion irradiation on hybrid organic/inorganic sol-gel derived thin films Academic Article uri icon

abstract

  • Hybrid organic/inorganic modified silicate thin films were synthesized by sol-gel processing from tetraethoxysilane (TEOS) and methyltriethoxysilane (MTES) precursors and spin-coated onto (1 0 0) Si substrates. A comparison was made of films which were heat treated at temperatures ranging from 300 C to 800 C and a film which was first heat treated at 300 C and subsequently irradiated using 2 MeV He+ ions with a fluence of 3 1015 ions/cm2. Nanoindentation was used to measure the hardness and reduced elastic modulus, both of which exhibited an order of magnitude increase after irradiation. The increase in hardness and reduced elastic modulus of the irradiated film was accompanied by a 50% reduction in H concentration. X-ray photoelectron spectroscopy was also employed to examine the changes in C, O and Si composition resulting from heat treatment and ion irradiation. 2007 Elsevier B.V. All rights reserved.

published proceedings

  • NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

author list (cited authors)

  • Ghisleni, R., Shao, L., Lucca, D. A., Doan, V., Nastasi, M., Dong, J., & Mehner, A.

citation count

  • 9

complete list of authors

  • Ghisleni, R||Shao, L||Lucca, DA||Doan, V||Nastasi, M||Dong, J||Mehner, A

publication date

  • August 2007