Optimal Scheduling of k-Unit Production of Cluster Tools with Single-Blade Robots Conference Paper

abstract

• The main challenge in scheduling multi-cluster tools in semiconductor manufacturing is the interactions among clusters. These interactions create a -unit optimal production that do not exist in single-cluster tools. This paper analyzes optimal scheduling of -unit cycle production of multi-cluster tools with single-blade robots. A resource-based method is used to analytically derive closed-form expressions for the minimal cycle time of a multi-cluster tool. Conditions for decoupling multi-cluster tools and optimality conditions for the widely used pull schedule are also presented. An example from industry production is used to illustrate the derived formula and decoupling conditions. 2008 IEEE.

name of conference

• 2008 IEEE International Conference on Automation Science and Engineering

authors

• Song, Dezhen

published proceedings

• 2008 IEEE International Conference on Automation Science and Engineering

author list (cited authors)

• Chan, W., Yi, J., Ding, S., & Song, D.

citation count

• 13

complete list of authors

• Chan, Wai-Kin||Yi, Jingang||Ding, Shengwei||Song, Dezhen

publication date

• August 2008

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• 9 Industry, Innovation And Infrastructure

Digital Object Identifier (DOI)

• 10.1109/coase.2008.4626439

International Standard Book Number (ISBN) 13

• 9781424420230

start page

• 335

end page

• 340

URL

• http://dx.doi.org/10.1109/coase.2008.4626439

user-defined tag

• 9 Industry, Innovation and Infrastructure