Optimal scheduling of k-unit production of cluster tools with single-blade robots Conference Paper

abstract

• The main challenge in scheduling multi-cluster tools in semiconductor manufacturing is the interactions among clusters. These interactions create a κ-unit optimal production that do not exist in single-cluster tools. This paper analyzes optimal scheduling of κ-unit cycle production of multi-cluster tools with single-blade robots. A resource-based method is used to analytically derive closed-form expressions for the minimal cycle time of a multi-cluster tool. Conditions for decoupling multi-cluster tools and optimality conditions for the widely used pull schedule are also presented. An example from industry production is used to illustrate the derived formula and decoupling conditions. ©2008 IEEE.

name of conference

• 2008 IEEE International Conference on Automation Science and Engineering (CASE 2008)

authors

• Song, Dezhen

published proceedings

• 2008 IEEE International Conference on Automation Science and Engineering

author list (cited authors)

• Wai-Kin Chan, .., Jingang Yi, .., Shengwei Ding, .., & Dezhen Song

citation count

• 11

publication date

• August 2008

publisher

• IEEE  Publisher

Digital Object Identifier (DOI)

• 10.1109/coase.2008.4626439

International Standard Book Number (ISBN) 13

• 9781424420230

start page

• 335

end page

• 340