A Unified Method for Nonlinear Noise Analysis of All-Pole RF MEMS Tunable Filters
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A simple, unified approach is presented to theoretically calculate the effect of nonlinear noise in all-pole RF MEMS tunable filters. The proposed admittance-based calculation in the bandpass domain allows easy estimation of filter phase noise while considering the effect of nonlinearity, finite resonator quality factor, and frequency-dependence of inverter networks in Butterworth and Chebyshev tunable filters. Filter phase noise is calculated as a function of input power, tuning state, mechanical frequency offset, and filter order, and comparison of the results with previously published work shows excellent agreement. 2011 IEEE.