A 25-75-MHz RF MEMS tunable filter Academic Article uri icon


  • This paper presents a state-of-the-art discrete RF microelectromechanical systems (MEMS) tunable filter designed for 25-75-MHz operation. This paper also presents an enhanced model of the RF MEMS switch, which is used for accurate prediction of the tunable filter response. The two-pole lumped-element filter is based on digital capacitor banks with on-chip metal-contact RF MEMS switches and lumped inductors, and results in a tuning range of 3:1 with fine frequency resolution, and a return loss better than 13 dB for the entire tuning range. The relative bandwidth of the filter is 4 1% over the tuning range and the insertion loss is 3-5 dB, limited mostly by the inductor Q and the switch loss. The IIP 3 measurements prove that tunable filters with metal-contact series RF MEMS switches show extremely linear behavior (HP 3 > 68 dBm). 2007 IEEE.

published proceedings


altmetric score

  • 3

author list (cited authors)

  • Entesari, K., Obeidat, K., Brown, A. R., & Rebeiz, G. M.

citation count

  • 60

complete list of authors

  • Entesari, Kamran||Obeidat, Khaled||Brown, Andrew R||Rebeiz, Gabriel M

publication date

  • November 2007