A differential 4-bit 6.5-10-GHz RF MEMS tunable filter
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This paper presents a state-of-the-art RF microelectromechanical systems wide-band miniature tunable filter designed for 6.5-10-GHz frequency range. The differential filter, fabricated on a glass substrate using digital capacitor banks and microstrip lines, results in a tuning range of 44% with very fine resolution, and return loss better than 16 dB for the whole tuning range. The relative bandwidth of the filter is 5.10.4% over the tuning range and the size of the filter is 5 mm 4 mm. The insertion loss is 4.1 and 5.6 dB at 9.8 and 6.5 GHz, respectively, for a 1-k/sq fabricated bias line. The simulations show that, for a bias line with 10- k/sq resistance or more, the insertion loss improves to 3 dB at 9.8 GHz and 4 dB at 6.5 GHz. The measured IIP3 level is > 45 dBm for f > 500 kHz, and the filter can handle 250 mW of RF power for hot and cold switching. 2005 IEEE.
IEEE Transactions on Microwave Theory and Techniques
author list (cited authors)
Entesari, K., & Rebeiz, G. M.
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