Novel optical technique for microscopic imaging of water stains Academic Article

abstract

• We propose and experimentally demonstrate a fluorescent imaging technique for surface quality control of wet-cleaned silicon wafers. This simple technique allows sub-micron resolution and fast scanning, while it reveals significant information about water stains distribution. Distribution of water stains is measured using this novel technique and correlated to the surface structure.

authors

• Yakovlev, Vladislav

published proceedings

• APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

author list (cited authors)

• Yakovlev, V. V., Mikhaylichenko, K., & Ravkin, M.

citation count

• 3

complete list of authors

• Yakovlev, VV||Mikhaylichenko, K||Ravkin, M

publication date

• February 2005

publisher

• Springer Nature  Publisher

published in

• Applied Physics A: materials science and processing  Journal

keywords

• Bioengineering

Digital Object Identifier (DOI)

• 10.1007/s00339-003-2181-x

start page

• 309

end page

• 311

volume

• 80

issue

• 2