Fluorescent microscopy of wet-cleaned surfaces: imaging of water stains distribution Academic Article uri icon

abstract

  • We use fluorescence optical microscopy to identify water stains on the surface of wet-cleaned silicon wafers. By using a commonly used confocal microscope, submicron resolution is routinely achieved, and both micro- and macroscopic distribution of water stains can be measured. The proposed technique is easy to implement, does not require any special conditions such as vacuum, and can serve as a powerful method in determining the optimal conditions for wet cleaning. 2003 Society of Photo-Optical Instrumentation Engineers.

published proceedings

  • Optical Engineering

author list (cited authors)

  • Yakovlev, V. V.

citation count

  • 2

complete list of authors

  • Yakovlev, VV

publication date

  • June 2003