Fluorescent microscopy of wet-cleaned surfaces: imaging of water stains distribution Academic Article uri icon


  • We use fluorescence optical microscopy to identify water stains on the surface of wet-cleaned silicon wafers. By using a commonly used confocal microscope, submicron resolution is routinely achieved, and both micro- and macroscopic distribution of water stains can be measured. The proposed technique is easy to implement, does not require any special conditions such as vacuum, and can serve as a powerful method in determining the optimal conditions for wet cleaning. 2003 Society of Photo-Optical Instrumentation Engineers.

published proceedings


author list (cited authors)

  • Mikhaylichenko, K., & Yakovlev, V. V.

citation count

  • 2

complete list of authors

  • Mikhaylichenko, K||Yakovlev, VV

publication date

  • July 2003