Fluorescent microscopy of wet-cleaned surfaces: imaging of water stains distribution
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We use fluorescence optical microscopy to identify water stains on the surface of wet-cleaned silicon wafers. By using a commonly used confocal microscope, submicron resolution is routinely achieved, and both micro- and macroscopic distribution of water stains can be measured. The proposed technique is easy to implement, does not require any special conditions such as vacuum, and can serve as a powerful method in determining the optimal conditions for wet cleaning. 2003 Society of Photo-Optical Instrumentation Engineers.
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