Fluorescent microscopy of wet-cleaned surfaces: imaging of water stains distribution Academic Article

abstract

• We use fluorescence optical microscopy to identify water stains on the surface of wet-cleaned silicon wafers. By using a commonly used confocal microscope, submicron resolution is routinely achieved, and both micro- and macroscopic distribution of water stains can be measured. The proposed technique is easy to implement, does not require any special conditions such as vacuum, and can serve as a powerful method in determining the optimal conditions for wet cleaning. 2003 Society of Photo-Optical Instrumentation Engineers.

authors

• Yakovlev, Vladislav

published proceedings

• OPTICAL ENGINEERING

author list (cited authors)

• Mikhaylichenko, K., & Yakovlev, V. V.

citation count

• 2

complete list of authors

• Mikhaylichenko, K||Yakovlev, VV

publication date

• July 2003

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Optical Engineering  Journal

keywords

• FLUORESCENCE
• Imaging
• Microscopy
• Quality Control
• Silicon
• Surface

Digital Object Identifier (DOI)

• 10.1117/1.1578493

start page

• 2051

end page

• 2055

volume

• 42

issue

• 7

URL

• http%3A%2F%2Fdx.doi.org%2F10.1117%2F1.1578493