Thin-Film Removal Using Ultrashort Laser Pulses Conference Paper

abstract

• The use of ultrashort laser pulses for surface cleaning and thin film removal was discussed. An amplified femtosecond Ti:sapphire laser system was employed to obtain higher incident powers. Results showed that 5-? m diameter spot was removed, limited only by the focusing optics.

name of conference

• Summaries of Papers Presented at the Lasers and Electro-Optics. CLEO '02. Technical Diges

authors

• Yakovlev, Vladislav

published proceedings

• Summaries of Papers Presented at the Lasers and Electro-Optics. CLEO '02. Technical Diges

author list (cited authors)

• Magyar, J., Sklyarov, A., Yakovlev, V. V., & Mikhailichenko, K.

citation count

• 0

complete list of authors

• Magyar, J||Sklyarov, A||Yakovlev, VV||Mikhailichenko, K

publication date

• January 2002

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

Digital Object Identifier (DOI)

• 10.1109/cleo.2002.1033479

start page

• 96

end page

• 96

URL

• http%3A%2F%2Fdx.doi.org%2F10.1109%2Fcleo.2002.1033479