Thin-film removal using ultrashort laser pulses Conference Paper uri icon

abstract

  • The use of ultrashort laser pulses for surface cleaning and thin film removal was discussed. An amplified femtosecond Ti:sapphire laser system was employed to obtain higher incident powers. Results showed that 5-? m diameter spot was removed, limited only by the focusing optics.

name of conference

  • Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Conference Edition

published proceedings

  • Summaries of Papers Presented at the Lasers and Electro-Optics. CLEO '02. Technical Diges

author list (cited authors)

  • Magyar, J., Sklyarov, A., & Yakovlev, V. V.

citation count

  • 0

complete list of authors

  • Magyar, J||Sklyarov, A||Yakovlev, VV

publication date

  • January 2002