Thin-film removal using ultrashort laser pulses
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The use of ultrashort laser pulses for surface cleaning and thin film removal was discussed. An amplified femtosecond Ti:sapphire laser system was employed to obtain higher incident powers. Results showed that 5-? m diameter spot was removed, limited only by the focusing optics.
name of conference
Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Conference Edition
Summaries of Papers Presented at the Lasers and Electro-Optics. CLEO '02. Technical Diges
author list (cited authors)
Magyar, J., Sklyarov, A., & Yakovlev, V. V.
complete list of authors
Magyar, J||Sklyarov, A||Yakovlev, VV