Brillouin micro-elastography of laser processed materials
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2017 SPIE. 3D laser processing is becoming a mainstream of micro- and nano- fabrication. However, very little is known how physical, chemical and/or structural changes induced by laser irradiation affect local mechanical properties. In this report, we, for the first time, utilize Brillouin microspectroscopy to assess and image the variation of viscoelastic properties of materials induced by laser processing.