Gold-coated scanning probes for direct ‘write’ of sub-micron metallic structures Academic Article uri icon

abstract

  • The fabrication and application of new gold-coated scanning probes (SPs) for direct 'write' of sub-micron metallic structures are reported. The SP consists of a base structure made of silicon nitride and a thin gold coating. The tip profile and radius of curvature are tightly controlled in the probe fabrication to ensure a predictable tip-substrate contact. By scanning a fabricated probe on a single crystal silicon surface in an ambient environment, sub-micron gold lines were formed as a result of direct gold material transfer from the SP tip onto the silicon surface, which is believed to be induced by the friction and wear associated with the probe scanning. © The Institution of Engineering and Technology.

author list (cited authors)

  • Yapici, M. K., Lee, H., Zou, J., & Liang, H.

citation count

  • 5

publication date

  • January 2008