Mechanisms of formation of nanostructures with atomic force microcopy Conference Paper uri icon


  • The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.

name of conference

  • BioMEMS and Nanotechnology III

published proceedings


author list (cited authors)

  • Lee, H., Peng, L., Wang, K., Yapici, M. K., Zou, J., & Liang, H.

citation count

  • 1

complete list of authors

  • Lee, H||Peng, L||Wang, K||Yapici, MK||Zou, J||Liang, H

editor list (cited editors)

  • Nicolau, D. V., Abbott, D., Kalantar-Zadeh, K., Di Matteo, T., & Bezrukov, S. M.

publication date

  • December 2008