Effects of post metallization annealing on the electrical reliability of ultra-thin HfO/sub 2/films with MoN and WN gate electrodes Conference Paper uri icon

author list (cited authors)

  • Chatterjee, S., Kuo, Y., Lu, J., Tewg, J., & Majhi, P.

citation count

  • 1

publication date

  • January 2005

publisher