A new copper dry etching process Conference Paper

authors

• Kuo, Yue

published proceedings

• PLASMA ETCHING PROCESSES FOR SUB-QUARTER MICRON DEVICES, PROCEEDINGS

author list (cited authors)

• Kuo, Y., & Lee, S.

complete list of authors

• Kuo, Y||Lee, S

publication date

• January 2000

International Standard Book Number (ISBN) 10

• 1-56677-253-2

start page

• 328

end page

• 335

volume

• 99

issue

• 30