Laser stenciling for polymer microfluidic devices Conference Paper uri icon


  • This paper presents a novel laser micromachining method that utilizes a microfabricated silicon stencil and a CO2 laser for low-cost 10 m-resolution machining of polymer substrates. With this stenciling method, arrays of microchannels and microholes were patterned in poly(dimethylsiloxane) (PDMS) and Kapton films, with minimum recorded feature sizes of 8.4 m and 12.6 m, respectively. An example multi-layer microfluidic device, comprised of PDMS layers with stenciled features, is presented to demonstrate the prototyping capability of this technique.

published proceedings

  • 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010

author list (cited authors)

  • Longsine, W., & Han, A.

complete list of authors

  • Longsine, W||Han, A

publication date

  • December 2010