Laser stenciling for polymer microfluidic devices
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This paper presents a novel laser micromachining method that utilizes a microfabricated silicon stencil and a CO2 laser for low-cost 10 m-resolution machining of polymer substrates. With this stenciling method, arrays of microchannels and microholes were patterned in poly(dimethylsiloxane) (PDMS) and Kapton films, with minimum recorded feature sizes of 8.4 m and 12.6 m, respectively. An example multi-layer microfluidic device, comprised of PDMS layers with stenciled features, is presented to demonstrate the prototyping capability of this technique.
