Resonant interferometric lithography beyond the diffraction limit
Conference Paper
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Overview
name of conference
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11th European Quantum Electronics Conference (CLEO/EQEC)
published proceedings
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CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference
author list (cited authors)
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Kiffner, M., Evers, J., & Zubairy, M. S.
citation count
complete list of authors
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Kiffner, M||Evers, J||Zubairy, MS
publication date
publisher
Identity
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 13
Other
URL
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http://dx.doi.org/10.1109/cleoe-eqec.2009.5191623