Passivation of the 157 nm pellicle with nanometer thin films Conference Paper uri icon

abstract

  • The polymeric 157 nm pellicle was passivated on both sides to isolate it from environmental contamination. TAF pellicles were sputter deposited with 5 nm thick films of CaF 2, MgF 2, Al, Mg, TiN, SiN x, Si, and PTFE, separately. The light transmission and life expectancy of the coated and uncoated pellicles were investigated. The coated pellicles were also analyzed with ESCA for surface structure changes. The coating process changed the pellicle's deterioration mechanism and life expectancy.

name of conference

  • 23rd Annual BACUS Symposium on Photomask Technology

published proceedings

  • 23RD ANNUAL BACUS SYMPOSIUM ON PHOTOMASK TECHNOLOGY, PTS 1 AND 2

author list (cited authors)

  • Kuo, Y., Lu, J., Tewg, J. Y., & Zimmerman, P. A.

citation count

  • 0

complete list of authors

  • Kuo, Y||Lu, J||Tewg, JY||Zimmerman, PA

editor list (cited editors)

  • Kimmel, K. R., & Staud, W.

publication date

  • December 2003