TFTs beyond LCD pixel driving and experience for 45 mm ULSIC process development Conference Paper uri icon

abstract

  • Due to the recent new developments in TFTs, there are questions on whether TFT will become a competing technology with MOSFET for ULSIC. In this paper, the author analyzed strengths and weaknesses of these two technologies. The large-area TFT technology development experience can greatly benefit ULSIC in both the 450 mm wafer production and new nano-device fabrication processes. Although the two technologies will grow in different areas, they can be integrated into a multi- functional product in some cases.

author list (cited authors)

  • Kuo, Y.

publication date

  • December 2007