Characterization of vapor diffused Zn:LiTaO/sub 3/ optical waveguides Academic Article uri icon


  • Diffusion and optical properties of planar waveguides produced in LiTaO3 by a recently developed technique that utilizes Zn diffusion from vapor phase are presented. The waveguides are obtained by 6-h diffusion at temperatures as low as 800°C. The results indicate that Zn is a fast diffusant in LiTaO3 and has activation energies that are slightly less than those for Ti diffusion into LiTaO3. The diffusion temperatures for Zn are much lower than the 1150-1200°C requires for Ti metal indiffusion. The diffusion coefficient of Zn at 800°C, is comparable to that of Ti at 1200°C. The resulting waveguides support both ordinary and extraordinary modes of polarization. The low temperature diffusion slows out diffusion and has been shown to be advantageous for making low-loss optical waveguides in LiTaO3. © 1988 IEEE.

altmetric score

  • 3

author list (cited authors)

  • Yoon, D. W., & Eknoyan, O.

citation count

  • 16

publication date

  • June 1988