Parameter Identification for Nanopositioning of a 6-Axis Maglev Stage with Moving Lorentz Coils
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© 2016 IEEE. This paper presents the design, parameter identification, and control of a 6-axis magnetically-levitated (maglev) nanopositioning stage with the xy travel ranges on the order of centimeters. The maglev stage has a moving frame with Lorentz coils and a stationary Halbach magnet matrix. A new method to identify the dynamic models is developed and verified experimentally. The dimension and the mass of the moving platen are 14.3 cm × 14.3 cm and 0.75 kg, respectively. With the multi-input-multi-output system decoupled into six single-input-single-output (SISO) systems, proportional-integral-derivative (PID) controllers are designed and tested on the 6-axis maglev stage. The achieved positioning resolutions are 10 nm in x, y, and z, 0.1 μrad in out-of-plane rotations, and 1 μrad in the rotation about the vertical axis. The achieved acceleration in the horizontal plane is 0.6 m/s2. With laser interferometers, the maximum travel range of the stage is 35 mm χ 56 mm, limited by the lengths of the precision mirrors.
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