Parameter Identification for Nanopositioning of a 6-Axis Maglev Stage with Moving Lorentz Coils
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abstract
2016 IEEE. This paper presents the design, parameter identification, and control of a 6-axis magnetically-levitated (maglev) nanopositioning stage with the xy travel ranges on the order of centimeters. The maglev stage has a moving frame with Lorentz coils and a stationary Halbach magnet matrix. A new method to identify the dynamic models is developed and verified experimentally. The dimension and the mass of the moving platen are 14.3 cm 14.3 cm and 0.75 kg, respectively. With the multi-input-multi-output system decoupled into six single-input-single-output (SISO) systems, proportional-integral-derivative (PID) controllers are designed and tested on the 6-axis maglev stage. The achieved positioning resolutions are 10 nm in x, y, and z, 0.1 rad in out-of-plane rotations, and 1 rad in the rotation about the vertical axis. The achieved acceleration in the horizontal plane is 0.6 m/s2. With laser interferometers, the maximum travel range of the stage is 35 mm 56 mm, limited by the lengths of the precision mirrors.
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2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM)