Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance Conference Paper uri icon


  • The performance of a MEMS aluminum nitride trampoline-shape piezoelectric resonator is analyzed using three-dimensional finite element simulations. The device, targeted to operate at frequencies in the 3 GHz range is suitable for ultra-high-frequency (UHF) filtering applications. Material damping is accounted for in the model. The simulations are used to predict the effects of various geometric parameters on the resonator overall performance which is evaluated with the effective acoustic coupling coefficient (K2) and the quality factor (Q) and extracted from the electrical impedance frequency response plots. The results indicate that (i) K2 is insensitive to geometry (K 26.5%), (ii) Q increases linearly with the A1N thickness and (iii) a trampoline resonator with three legs is slightly more efficient than those with more. 2009 IEEE.

name of conference

  • 2009 6th International Symposium on Mechatronics and its Applications (ISMA)

published proceedings

  • 2009 6th International Symposium on Mechatronics and its Applications

author list (cited authors)

  • Ruimi, A., Liang, Y., & McMeeking, R. M.

complete list of authors

  • Ruimi, Annie||Liang, Yueming||McMeeking, Robert M

publication date

  • January 1, 2009 11:11 AM