MEMS aluminum nitride trampoline resonators in pairs and quads for UHF filtering applications: Computational performance
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Piezoelectric filtering devices with micro-scale dimensions are excellent candidates for reaching the ultra-high-frequencies (UHF) needed in wireless communication systems. A multidisciplinary team at UCSB has collaborated to design, fabricate and characterize experimentally as well as numerically the performance of a filter consisting of an assembly of aluminum nitride trampoline-resonators approximately 300 m in diameter and 2 m thick and responding to longitudinal vibrations. In this paper, we report on the numerical results obtained with finite element simulations. We analyze if and how, assembling the resonators in pairs and quads affects the performance of the device. It is found that i) the array arrangement is not responsible for the degradation of the Q-factor (Q2000), ii) highest values of the electromechanical coupling coefficient (K 2= 6.1%) are obtained when the resonators are separated by the longest slabs and iii) the K 2 of each resonator adds up to the K 2 of a single resonator. AES-Advanced Engineering Solutions, Ottawa, Canada. All rights are reserved.
