Robust Control of an Electrostatic Microelectromechanical Actuator
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abstract
A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent position. This paper addresses the control of an electrostatic microelectromechanical actuator to reduce the vibration effect on its performance. A feedback linearization controller, a static sliding mode controller and a dynamic sliding mode controller are designed for the microelectromechanical system. The stability of the closed loop system is proved. Simulation results indicate that the proposed control schemes work well. Karkoub and Zribi.
