Cryogenic Dark Matter Search detector fabrication process and recent improvements Academic Article

abstract

• © 2014 Elsevier Ltd. All rights reserved. A dedicated facility has been commissioned for Cryogenic Dark Matter Search (CDMS) detector fabrication at Texas A&M University (TAMU). The fabrication process has been carefully tuned using this facility and its equipment. Production of successfully tested detectors has been demonstrated. Significant improvements in detector performance have been made using new fabrication methods/equipment and tuning of process parameters.

authors

• Harris, Rusty
• Mahapatra, Rupak

altmetric score

• 9.5

author list (cited authors)

• Jastram, A., Harris, H. R., Mahapatra, R., Phillips, J., Platt, M., Prasad, K., Sander, J., & Upadhyayula, S.

citation count

• 3

publication date

• February 2015

publisher

• Elsevier BV  Publisher

published in

• NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT  Journal

keywords

• Cdms
• Cryogenic Detector
• Dark Matter
• Photolithography
• Semiconductor Detector
• Transition Edge Sensor

Digital Object Identifier (DOI)

• 10.1016/j.nima.2014.10.043

start page

• 14

end page

• 25

volume

• 772

URL

• http://dx.doi.org/10.1016/j.nima.2014.10.043