Challenges and Needs for Automating Nano Image Processing for Material Characterization Conference Paper

abstract

• 2015 SPIE. Image processing techniques are needed to extract critical information pertinent to nano material characterization but the current processing methods are slow, expensive and labor intensive. There is a strong need to develop fast and reliable methods, enabling process control compatible automated processing of nano images. The authors believe specialized techniques are needed to address the challenges, and will discuss the recent development of nano image processing methods as well as the near- and medium-terms needs in the area of nano metrology and imaging. The authors will share their broad perspectives on this research direction. Downloading of the abstract is permitted for personal use only.

name of conference

• Nanoengineering: Fabrication, Properties, Optics, and Devices XII

authors

• Bukkapatnam, Satish

published proceedings

• NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, AND DEVICES XII

author list (cited authors)

• Ding, Y. u., & Bukkapatnam, S.

citation count

• 6

complete list of authors

• Ding, Yu||Bukkapatnam, Satish TS

editor list (cited editors)

• Campo, E. M., Dobisz, E. A., & Eldada, L. A.

publication date

• January 2015

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• ELECTRON MICROSCOPY
• Nano Metrology
• Quality And Process Control
• Scalable Nanomanufacturing

Digital Object Identifier (DOI)

• 10.1117/12.2186251

International Standard Book Number (ISBN) 13

• 9781628417227

start page

• 95560z-95560z-7

volume

• 9556

URL

• http%3A%2F%2Fdx.doi.org%2F10.1117%2F12.2186251