Optical waveguide gratings in chalcogenide glass - art. no. 689607 Conference Paper uri icon

abstract

  • Fabrication results are reported for making optical gratings in chalcogenide glasses. Two approaches are being investigated: 1) thermal nanoimprinting of the glass using a mold master, and 2) direct patterning of the chalcogenide glass using a combination of electron beam lithography (EBL) and reactive ion etching (RIE). Preliminary results are presented for the nanoimprint and EBL experiments. The nanoimprint results show very smooth sidewalls.

name of conference

  • Integrated Optics: Devices, Materials, and Technologies XII

published proceedings

  • INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XII

author list (cited authors)

  • Xia, X., Solmaz, M., Park, H., Cheng, X., & Madsen, C. K.

citation count

  • 0

complete list of authors

  • Xia, Xin||Solmaz, Mehmet||Park, Hyunsoo||Cheng, Xing||Madsen, Christi K

editor list (cited editors)

  • Greiner, C. M., & Waechter, C. A.

publication date

  • January 1, 2008 11:11 AM