Structure and mechanical properties of low temperature magnetron sputtered nanocrystalline (nc-)Ti(N,C)/amorphous diamond like carbon (a-C:H) coatings uri icon

abstract

  • This paper reports on the structure and mechanical properties of 2 m thick nanocomposite (nc-) Ti(N,C)/amorphous diamond like carbon (a-C:H) coatings deposited on 100Cr6 steel substrates, using low temperature ( 200 C) DC reactive magnetron sputtering. The carbon content was varied with acetylene partial pressure in order to obtain single layer coatings with different a-C:H carbon phase fractions. The nanocrystalline Ti(N,C) phase is approximately stoichiometric for all coatings and the a-C:H phase fraction increases from 31 to 47 at.% as the coatings stoichiometry changed from TiC 1.34 N0.51 to TiC2.48 N0.48, respectively. TiC1.34 N0.51 coatings showed the highest nanoindentation hardness (H) of 14 GPa and a modulus (Er) of 144 GPa; H reduced to < 6 GPa and Er to < 70 GPa for TiC2.48 N0.48 coatings. nc-Ti(N,C)/a-C:H coatings are promising candidates for applications where better matching of the modulus between a relatively low modulus substrate, hard loading support layer and low modulus-high H/E ratio top layer is required. 2010 Elsevier B.V. All rights reserved.

published proceedings

  • THIN SOLID FILMS

author list (cited authors)

  • Tsotsos, C., Baker, M. A., Polychronopoulou, K., Gibson, P. N., Giannakopoulos, K., Polycarpou, A. A., Boebel, K., & Rebholz, C.

citation count

  • 9

complete list of authors

  • Tsotsos, C||Baker, MA||Polychronopoulou, K||Gibson, PN||Giannakopoulos, K||Polycarpou, AA||Boebel, K||Rebholz, C

publication date

  • October 2010