Nanowear of Hafnium Diboride Thin Films
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abstract
Chemical Vapor Deposition-grown HfB 2 films were subjected to nanowear testing at normal loads of 50-500 N. The material response was investigated by measuring residual wear depths and wear scar roughness and by calculating wear rates and specific energies. Films annealed for 1 h at 800 C showed significant reduction in wear rate and required a higher critical energy for wear, compared to as-deposited HfB 2 films. Analysis of roughness of the worn scars revealed that plowing effect dominates at higher loads (200-500 N), whereas at lower loads, asperity flattening dominates. The excellent response of annealed HfB 2 films to nanotribological testing demonstrates the poten1tial of these films for applications requiring high wear resistance at the nanoscale.