A correction to the nanoindentation technique for ultrashallow indenting depths Academic Article uri icon


  • A correction to the nanoindentation technique taking into account the elastic recovery at extremely shallow contact depths was proposed. Using a high-sensitivity nanoindentation system with a sharp indenting tip, the magnitude of the elastic recovery could be obtained directly from very low-force load-unload curves, which was then used to correct the contact area used for hardness measurements. Nanoindentation experiments were performed on a standard fused quartz sample and, compared to standard nanoindentation techniques, the proposed method was found to be more accurate at ultrashallow indenting depths of <3 nm. © 2007 Materials Research Society.

author list (cited authors)

  • Yeo, C., & Polycarpou, A. A.

citation count

  • 6

publication date

  • September 2007