Nanomechanical and nanotribological behaviors of hafnium boride thin films Academic Article uri icon

abstract

  • 2015 Nanocrystalline HfB2, HfBN and multilayer HfB2/HfBN films were deposited using chemical vapor deposition. Half of the amorphous as-deposited films were subjected to annealing at 700C to obtain their annealed equivalent samples. Nanoindentation and nanoscratch experiments were performed to measure their mechanical properties, friction and scratch/wear behavior. The annealed films showed higher hardness values compared to the as-deposited films, with the HfB2 film exhibiting the highest hardness. All three films exhibited similar shear strength around 3GPa for as-deposited and 5.5GPa for annealed films, implying reduced delamination propensity for the annealed samples. The annealed HfBN and multilayer HfB2/HfBN films exhibited lower friction and wear, compared to the rest of the films. Specifically, the annealed multilayer HfB2/HfBN films, exhibited an order of magnitude lower wear, compared to the HfB2 films, making them excellent candidates for low friction and low wear hard coating applications.

published proceedings

  • THIN SOLID FILMS

author list (cited authors)

  • Chowdhury, S., Polychronopoulou, K., Cloud, A., Abelson, J. R., & Polycarpou, A. A.

citation count

  • 11

complete list of authors

  • Chowdhury, Shahla||Polychronopoulou, Kyriaki||Cloud, Andrew||Abelson, John R||Polycarpou, Andreas A

publication date

  • November 2015