Experimental characterization of micromachined electromagnetic probes using scanning Hall probe microscopy Conference Paper

abstract

• We present the experimental characterization of micromachined electromagnetic probe using scanning Hall probe microscopy. The tested electromagnetic probe consists of a protruding sharp Permalloy needle embedded into a three-dimensional gold conducting coil, which is fabricated with a simple and straightforward micromachining process. By using a scanning Hall probe microscope, a comprehensive high-spatial resolution characterization of the probe performance (e.g. peak magnetic intensity and spatial field distribution) is achieved for the first time. 2007 IEEE.

name of conference

• TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

authors

• Naugle, Donald
• Zou, Jun

published proceedings

• TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2

author list (cited authors)

• Yapici, M. K., Ozmetin, A. E., Zou, J., & Naugle, D. G.

citation count

• 1

complete list of authors

• Yapici, MK||Ozmetin, AE||Zou, J||Naugle, DG

publication date

• June 2007

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• Magnetic Field Measurement
• Micro Electromagnetic Probe
• Scanning Hall Probe

Digital Object Identifier (DOI)

• 10.1109/sensor.2007.4300645

International Standard Book Number (ISBN) 10

• 1424408423

International Standard Book Number (ISBN) 13

• 978-1-4244-0841-2

start page

• 2365

end page

• 2368

URL

• http%3A%2F%2Fdx.doi.org%2F10.1109%2Fsensor.2007.4300645