Experimental Characterization of Micromachined Electromagnetic Probes using Scanning Hall Probe Microscopy Conference Paper uri icon

abstract

  • We present the experimental characterization of micromachined electromagnetic probe using scanning Hall probe microscopy. The tested electromagnetic probe consists of a protruding sharp Permalloy needle embedded into a three-dimensional gold conducting coil, which is fabricated with a simple and straightforward micromachining process. By using a scanning Hall probe microscope, a comprehensive high-spatial resolution characterization of the probe performance (e.g. peak magnetic intensity and spatial field distribution) is achieved for the first time. 2007 IEEE.

name of conference

  • TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

published proceedings

  • TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

author list (cited authors)

  • Yapici, M. K., Ozmetin, A. E., Zou, J., & Naugle, D. G.

citation count

  • 1

complete list of authors

  • Yapici, MK||Ozmetin, AE||Zou, J||Naugle, DG

publication date

  • January 2007

publisher