Experimental Characterization Of Micromachined Electromagnetic Probes Using Scanning Hall Probe Microscopy Conference Paper uri icon


  • We present the experimental characterization of micromachined electromagnetic probe using scanning Hall probe microscopy. The tested electromagnetic probe consists of a protruding sharp Permalloy needle embedded into a three-dimensional gold conducting coil, which is fabricated with a simple and straightforward micromachining process. By using a scanning Hall probe microscope, a comprehensive high-spatial resolution characterization of the probe performance (e.g. peak magnetic intensity and spatial field distribution) is achieved for the first time. ©2007 IEEE.

author list (cited authors)

  • Yapici, M. K., Ozmetin, A. E., Zou, J., & Naugle, D. G.

publication date

  • January 1, 2007 11:11 AM