DOPING PROCESS-CONTROL IN SILICON EPITAXY (III) - REALIZATION OF OPTIMUM CONTROL FUNCTION Academic Article

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authors

Valko, Peter

published proceedings

CRYSTAL RESEARCH AND TECHNOLOGY

author list (cited authors)

RICHTER, F., KOSZA, G., SPERLING, R., & VALKO, P.

citation count

0

complete list of authors

RICHTER, F||KOSZA, G||SPERLING, R||VALKO, P

publication date

January 1985

publisher

Wiley Publisher

published in

Crystal Research and Technology: journal of experimental and industrial crystallography Journal