Prioritizing efforts to improve yield Academic Article uri icon

abstract

  • Contamination control is a major issue in semiconductor devices fabrication. While most production lines have a contamination monitoring system, the direct correlation between the detected defect level and device yield is not always obvious and therefore prioritizing quick yield improvement efforts can be difficult. This paper presents a solution for the problem, with a case study that confirmed the result of the proposed method.

published proceedings

  • International Journal of Industrial Engineering : Theory Applications and Practice

author list (cited authors)

  • Mori, K., Nguyen, N., & Hsieh, S. J.

complete list of authors

  • Mori, K||Nguyen, N||Hsieh, SJ

publication date

  • December 2000