Techniques for improving SIMS depth resolution: C-60(+) primary ions and backside depth profile analysis Conference Paper uri icon

published proceedings

  • CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005

author list (cited authors)

  • Windsor, E., Gillen, G., Bright, D., Chi, P., Fahey, A., & Batteas, J.

citation count

  • 0

complete list of authors

  • Windsor, E||Gillen, G||Bright, D||Chi, P||Fahey, A||Batteas, J

publication date

  • September 2005