Silicon Platform for Mid-infrared Optofluidic Sensors Academic Article uri icon


  • ABSTRACTMid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 um (2) Silicon offers CMOS compatible and monolithic fabrication (3) Silicon has high chemical resistance that can withstand high temperature, acid/base solution and organic solvents. (4) Silicon is a non-toxic environmentally friendly material. The fabricated mid-infrared optofluidic sensor can replace bulky instruments, such as FTIR, with a lab-on-a-chip system, while achieving much higher sensitivity.

published proceedings

  • MRS Advances

author list (cited authors)

  • Lin, P., Lin, H., Singh, V., Patel, N. S., Kimerling, L., & Agarwal, A. M.

citation count

  • 0

complete list of authors

  • Lin, Pao||Lin, Hao-Yu Greg||Singh, Vivek||Patel, Neil Sunil||Kimerling, Lionel||Agarwal, Anuradha Murthy

publication date

  • March 2013